GOST R 56191-2014 Cleanrooms Determination of cleanliness class using a safety factor《清洁室 采用安全因数测定清洁等级》.pdf

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1、 56191 2014 2015 561912014 II 1 - () - ( ) 2 184 3 24 2014 . 1428- 4 1.02012 ( 8). ( 1 ) , -. () - . , (gost.ru) , 2015 , - 561912014 III , , , . , , , -, , , - , . . , -. 14644-1. - : - 2 9 ; - 10 . - . - . , - . 14644-12002. , 10. , . 1), , 2 9. . , - , , . 1) . ., . . . 2/2013, . 10-16. Fedotov A

2、., Fedotov G. Cleanroom Classification with Safety Margin Factor for Small Number of Sample Loca-tions and Other Issues. ESTECH 2013 59th Annual Technical Meeting of IEST, April 29 May 2, 2013, San Diego,USA. 561912014 1 Cleanrooms. Determination of cleanliness class using a safety factor 201512 011

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5、,5( 0,5) m2 3 4 5 6 7 93,2 1,8 1,6 1,5 1,4 1,7 1,3 561912014 4 -. 5 - 0,5 3. 3 5 0,5 0,5 m2 3 4 5 6 7 91100 1960 2200 2350 2510 2510 2710 3 .2 , - 5 0,5 1100 /3. 14644-1 5 3520 /3 0,95. - 3520 1100 = 2420 /3. 1,3 2710 /3. 3520 /3( 23 %).2 1 . 4 5. 4 ( ( 1) m2 3 4 5 6 7 95,5 2,7 2,2 1,9 1,8 1,7 1,6 5 5 0,5 1 m2 3 4 5 6 7 9640 1300 1600 1850 1960 2070 2200 R = 1 , R = 0,5, R= 1 . 561912014 5 () . , - . 95 % - 95 % (, ). : - () (). 0, - . 95 % , 95 % , . . 5% 95% . , . 14644-1 , 95 % . . , - . , , . 14644-1 , 95 % - , 10 . , . :1) . , -, 2030 %; , -;2) , . . 14644-1 95 % - -, 2 9. ,

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