1、 8.7432011/ISO/TR 14999-1:2005 . 1, ISO/TR14999-1:2005State system for ensuring the uniformity of measurements.Optics and photonics Interferometric measurementof optical elements and optical systems. Part 1: Terms, definitions and fundamentalrelationships(IDT) 27 2002 . 184- , 1.02004 . 1 - ( )2 53
2、- 3 13 2011 . 1066-4 / 14999-1:2005 . . 1. , (ISO/TR 14999-1:2005 Optics and photonics Interferometricmeasurement of optical elements and optical systems. Part 1: Terms, definitions and fundamentalrelationships)5 , - . () - . , - , 2013 , - - II 8.7432011/ISO/TR 14999-1:20051 12 .12.1 , , , , . . 12
3、.2 22.3 .22.4 22.5 .32.6 .32.7 , , , .32.8 .42.9 .42.10 42.11 .42.12 .52.13 62.14 .83 103.1 ( ) .103.2 113.3 .143.4 .194 254.1 ; .254.2 .264.3 264.4 274.5 .305 31 () .32 33III 8.7432011/ISO/TR 14999-1:2005 ISO/TC 172/SC1 , O 10110 . 5 14 , - . ISO/ 172/S1 - . , -, , , . . -, . ( ) - , - . , . , - -
4、. , : 14999 . - , , 2- - 10,6 , , , 193 248 . , .IV 8.7432011/ISO/TR 14999-1:2005 . 1, State system for ensuring the uniformity of measurements. Optics and photonics. Interferometric measurements ofoptical elements and systems. Part 1. Terms, definitions and fundamental relationships 201303011 , , -
5、 . . ( ) , - , . - , , . , .2 2.1 , , , 1, 2. 1 , , , , ; / ; / ; D /2=c215/2 ; = /2=c215/2 * c101 /=c215/c215 c10108,854c2151012/ c101r11 8.7432011/ISO/TR 14999-1:2005 1 , * c109 / = c215/c215 c10901,257c215106/ c109r1 / 0299792458c215108/ n 1* : c101= c101c1010c215r.* :c109 =c109c1090c215r. 2 / ()
6、c209 c182c182c182c182c182c182xyz,c230c232c231c246c248c247 ()c209c89c182c121c182c182c121c182c182c121c182222222xyzc43c43c230c232c231c231c246c248c247c247c209c215c209 c61c209c121c1212 ()2.2 . , -, :c209c43 c61c209c45 c61c209c215 c61c209c215 c61c252c253c239c239c239c254c239c239c239xEBtxHDtDBc182c182c182c1
7、820000. (1) D , , :DEBHc61c61c252c253c254c101c109.(2) .2.3 c101 c109 (1) :c209c45c215 c61c209c45c215 c61c252c253c239c239c254c239c23922222200EEtHHtc101c109c182c182c101c109c182c182.(3)2.4 =c0c101c109c215.(4)2 8.7432011/ISO/TR 14999-1:2005 0=100c101c109c215.(5)2.5 - c101 c109 , . .n =cc0.(6)2.6 , . , -
8、 ( , ). (3) , c2092c121 1222ctc215c182c121c182=0.(7) (7) , c89 . , , - .2.7 , , , , - z. c89 : z tc89(z, t)=Uc215cos c119c100tzcc45c230c232c231c246c248c247 c43c233c235c234c249c251c250,(8) U ;c119 ;c100 . 2c112c110,c110 , . . , . c108c108=2c112c110c119=20c112c119cn,(9)k =2c112c108.(10) (8) . z c100 (
9、,c100 = c100(, ). , c100 = c100(, ), , . z = z(x, y), c100= c100x, y, z(x, y) = const. , , . , z, (n) () . U = U(x, y), . . ( ). c100 U - .3 8.7432011/ISO/TR 14999-1:20052.8 (8) :c89(z, t) = Reu(z)c215eit()c119(11)u(z)=U(z)eic106, c106 = c119zcc230c232c231c246c248c247+ c100,(12) u(z) ;U - (, );c106 - . , (8) - . (11) (12) .2.9 I :I =(E/A) c215c68t, I ; ; ;c68t .I ( ), . . () . , c110- . I, I c181 u2= U2.(13) I :I =c101c215c230c232c231c246c248c247c02c215uc215u*,(14) u* .2.10 S*, , , 1 :S = Ec215H. (15) S . - , - . ( !) I I = Sc215n, (16) n ;S .2.11 , t , - , ( 1). , r(x, y,
