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GOST R ISO 14644-10-2014 Cleanrooms and associated controlled environments Part 10 Classification of surface cleanliness by chemical concentration《洁净室和相关控制环境 第10部分 采用化学浓度法对表面洁净度的分类.pdf

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GOST R ISO 14644-10-2014 Cleanrooms and associated controlled environments Part 10 Classification of surface cleanliness by chemical concentration《洁净室和相关控制环境 第10部分 采用化学浓度法对表面洁净度的分类.pdf_第1页
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1、 14644-10 2014 10 ISO 14644-10:2013 Cleanrooms and associated controlled environments Part 10: Classification of surface cleanliness by chemical concentration (IDT) 2014 14644-102014 II 27 2002 . 184- , - 1.02004 -. 1 () , 4 2 184 3 - 24 2014 . 1407- 4 14644-10:2013 - . 10. - (ISO 14644-10:2013 Clea

2、nrooms and associated con-trolled environments Part 10: Classification of surface cleanliness by chemical concentration). - - , - 5 1.02012 ( 8). ( 1 ) , -. () - . , - (gost.ru) , 2014 -, - 14644-1020 14 III II 1 . 1 2 . 1 3 . 1 4 . 2 4.1 . 2 4.2 . 2 4.3 -SCC . 4 4.4 . 5 5 . 5 5.1 . 5 5.2 . 5 () . 7

3、 () , .14 C () .15 D () 16 () 28 () 29 .30 14644-102014 IV - . , , - , , , -. 14644-10 / 209 . 14644 : - 1. ; - 2. 14644-1; - 3. ; - 4. , ; - 5. ; - 6. ; - 7. ( , , -); - 8. ; - 9. ; - 10. . 14644-102014 1 10 Cleanrooms and associated controlled environments. Part 10. Classification of surface clean

4、liness by chemical concentration 201512 01 1 - , , , , - , , , , , . 1 . . 2 , , (, .), (-, ), . 2 . - . ( ). 14644-1:*) 1. (ISO 14644-1 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration) 14644-6 . - (ISO 14644-6 Cleanrooms and asso

5、ciated controlled environments Part 6: Vocabulary) 3 14644-6, - : 3.1 ; (air cleanliness by chem-ical concentration; ACC): , N, , (/3). *) 14644-1 . 14644-102014 2 , . 3.2 (contaminant category): . 3.3 (chemical contaminant): ( ), , . 3.4 (solid surface): . 3.5 (surface): . , , , - . 3.6 ; SCC (surf

6、ace cleanliness by chemical concentration, SCC): , . 3.7 NSCC(surface cleanliness by chemical concentration class NSCC): - , /2. 4 4.1 -SCC - . - /2, . (1). - /2. - - , ISO-SCC_, (2). 4.2 - SCCN , SCCC , /2. . 0,1 SCCN . - SCCC SCCN : SCCSCC10NC = (1) . . SCC 10 SCClogNC= . ( ) SCCC , - . SCCN . 1 4

7、.3. 2 (/2) ( , ) 4.4. 1 1. , - , . 14644-1020 14 3 1 ( -SCC) -SCC /2 /2 /20 1001091051 10-11081042 10-21071033 10-31061024 10-41051015 10-51041006 10-610310-17 10-710210-28 10-810110-39 10-910010-410 10-1010-110-511 10-1110-210-612 10-1210-310-7 14644-102014 4 1X , /2; 2X , /2; 3X , /2; Y -SCC 1 -SC

8、C 4.3 -SCC -SCC - ( ), . . , : -SCC N (), . 1 N-2- (NMP) - 9,810-7 /2, 6 10-6/2. - : -SCC 6 (NMP). 14644-1020 14 5 2 () 610-5/2, 4 10-4/2. : -SCC 4 (). 4.4 , , -, (1/2). - (/2) ( )SCC_numberSCCaMCCN= (2) SCC_numberC ( (1/2); SCCC (/2); N (6,021023/); , (/). .4 - (/2) ( /2) - . 5 5.1 D.2 D - . , , - , . 5.2.2. - , -. , D - . , , -. , . , . . , - D.4 D. , . -, , . -

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