1、 KSKSKSKS KS D ISO 20341SKSKSKS KSKSKS SKSKS KSKS SKS KS KS D ISO 20341： 2005 2005 12 28 D ISO 20341：2005 ( ) ( ) ( ) ： ：2005 12 28 20051007 ： ： ( ) ( 02 5097292 5) . 7 5 , . ICS 71.040.40 KS D ISO 20341：2005 Surface chemical analysis Secondary-ion mass spectrometry Method for estimating depth resol
2、ution parameters with multiple delta-layer reference materials 2003 ISO 20341 Surface chemical analysisSecondary-ion mass spectrometryMethod for estimating depth resolution parameters with multiple delta-layer reference materials . 1. 1.1 (SIMS) , , . 1.2 , / . 2. . , . KS D ISO 18115 3. z z0 L T AL
3、, AT B, C I(z) 4. 4.1 KS D ISO 18115 . , . . D ISO 20341：2005 4.2 (sputtered) (matrix) SIMS (matrix effect), SIMS . . 4.3 SIMS , . 4.4 . 4.5 1 % . 4.6 , , , X , . 5. 5.1 , , , , , , , , , . SIMS , . SIMS SIMS SIMS 20 % 10 , SIMS 1 % . 5.2 SIMS , (rounded top) . SIMS 2 (1) fL(z), (2) fT(z) g(z) (3) ,
4、 3 , L, T, . L0zzz zTexp0(2) 2202)(exp2zzBg(z)= (3) 5.3 SIMS , 1 % , . (： nm) . 5.4 . 2 D ISO 20341：2005 +2LL022LL01TL5.0exp)erf1( 5.0exp)erf1(zzzzCI(z) = (4) =L0121zz (5) =T0221zz (6) yeyd202 (7) erf = , 1 2 SIMS A . (4) 1 , 2 . 6. . a) , , b) c) d) . (4) A e) , , SIMS , f) g) 3 D ISO 20341：2005 A(
5、) SIMS A.1 SIMS . . 2 . A.2 ( nm .) . e . 10 . 5.1 5.3 , . SIMS SIMS 10 SIMS , SIMS 1 % . 4 D ISO 20341：2005 1 Dowsett M. G., Rowland G., Allen P. N. and Barlow R. D.： Surf. Interface Anal., 21, P. 310(1994) 2 Moon D.W., Won J.Y, Kim K,J., Kim H.J., Kang H. J., Petravic M., Surf. Interface Anal., 29
6、, P. 362 (2000) 5 2006 1 23 135513 7017 (02)60094567 (02)600948878 http:/ 607822 1 11( 10) (051)5571239 Fax. (051)557 0430 702012 2 1741( 3 ) (053)38415624 Fax. (053)384 1565 790 380 627( ) (054)2789611 Fax. (054)278 9662 406130 994( 16) (032)26002607 Fax. (032)260 0268 443766 9065( 9 ) (031)2597000
7、9 Fax. (031)259 7010 200041 1 9( 304) (033)252 9423, 254 9423 Fax. (033)256 9423 361802 1508 1( 6 ) (043)23624513 Fax. (043)236 2454 305343 2314( 5 ) (042)86423013 Fax. (042)864 2304 330 816 43 5( 1204 ) (041)58905003 Fax. (041)589 0504 561841 1 337 2( 7 ) (063)21422347 Fax. (063)214 2238 506301 621
8、15( 4 ) (062)95314357 Fax. (062)953 1438 641210 298 7 ( 6 ) (055)2121212 Fax. (055)212 1213 683804 7582( 2 ) (052)28966013 Fax. (052)289 6604 425020 541 3( 4 ) (031)48761914 Fax. (031)487 6195 730350 9230( 8 ) (054)4736954 Fax. (054)473 6955 480848 2 487 6( 3 ) (031)82981824 Fax. (031)8298185 KS D ISO 20341：2005 KSKSKSSKSKS KSKS SKS KSKS SKSKS KSKSKSSurface chemical analysisSecondary ion mass spectrometryMethod for estimating depth resolution parameters with multiple delta layer reference materials ICS 71.040.40 KOREAN STANDARDS ASSOCIATION
