1、Designation: E2444 111Terminology Relating toMeasurements Taken on Thin, Reflecting Films1This standard is issued under the fixed designation E2444; the number immediately following the designation indicates the year oforiginal adoption or, in the case of revision, the year of last revision. A numbe
2、r in parentheses indicates the year of last reapproval. Asuperscript epsilon () indicates an editorial change since the last revision or reapproval.1NOTEAdditional sources for terms were added editorially in August 2012.1. Scope1.1 This standard consists of terms and definitions pertain-ing to measu
3、rements taken on thin, reflecting films, such asfound in microelectromechanical systems (MEMS) materials.In particular, the terms are related to the standards in Section 2,which were generated by Committee E08 on Fatigue andFracture. Terminology E1823 Relating to Fatigue and FractureTesting is appli
4、cable to this standard.1.2 The terms are listed in alphabetical order.2. Referenced Documents2.1 ASTM Standards:2E1823 Terminology Relating to Fatigue and Fracture TestingE2244 Test Method for In-Plane Length Measurements ofThin, Reflecting Films Using an Optical InterferometerE2245 Test Method for
5、Residual Strain Measurements ofThin, Reflecting Films Using an Optical InterferometerE2246 Test Method for Strain Gradient Measurements ofThin, Reflecting Films Using an Optical Interferometer3. Terminology3.1 Terms and Their Definitions:2-D data tracea two-dimensional group of points that isextract
6、ed from a topographical 3-D data set and that isparallel to the xz-oryz-plane of the interferometricmicroscope. E2244, E22453-D data seta three-dimensional group of points with atopographical z-value for each (x, y) pixel location within theinterferometric microscopes field of view. E2244, E2245,E22
7、46anchorin a surface-micromachining process, the portion ofthe test structure where a structural layer is intentionallyattached to its underlying layer. E2244, E2245, E2246anchor lipin a surface-micromachining process, the free-standing extension of the structural layer of interest aroundthe edges o
8、f the anchor to its underlying layer.DISCUSSIONIn some processes, the width of the anchor lip may bezero. E2244, E2245, E2246bulk micromachininga MEMS fabrication process wherethe substrate is removed at specified locations. E2244,E2245, E2246cantilevera test structure that consists of a freestandin
9、gbeam that is fixed at one end. E2244, E2245, E2246fixed-fixed beam a test structure that consists of a freestand-ing beam that is fixed at both ends. E2244, E2245in-plane length (or deflection) measurement, L (or D)Lthe experimental determination of the straight-linedistance between two transitiona
10、l edges in a MEMS device.DISCUSSIONThis length (or deflection) measurement is made paral-lel to the underlying layer (or the xy-plane of the interferometricmicroscope). E2244, E2245, E2246interferometera non-contact optical instrument used toobtain topographical 3-D data sets.DISCUSSIONThe height of
11、 the sample is measured along the z-axisof the interferometer. The x-axis is typically aligned parallel orperpendicular to the transitional edges to be measured. E2244,E2245, E2246MEMSmicroelectromechanical systems. E2244, E2245,E2246microelectromechanical systems, MEMSin general, thisterm is used t
12、o describe micron-scale structures, sensors,actuators, and technologies used for their manufacture (suchas, silicon process technologies), or combinations thereof.E2244, E2245, E2246residual strain, rin a MEMS process, the amount ofdeformation (or displacement) per unit length constrainedwithin the
13、structural layer of interest after fabrication yet1This test method is under the jurisdiction of ASTM Committee E08 on Fatigueand Fracture and is the direct responsibility of Subcommittee E08.02 on Standardsand Terminology.Current edition approved Oct. 15, 2011. Published December 2011. Orginiallyap
14、proved in 2005. Last previous edition approved in 2005 as E2444051. DOI:10.1520/E2444-11E01.2For referenced ASTM standards, visit the ASTM website, www.astm.org, orcontact ASTM Customer Service at serviceastm.org. For Annual Book of ASTMStandards volume information, refer to the standards Document S
15、ummary page onthe ASTM website.Copyright ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959. United States1before the constraint of the sacrificial layer (or substrate) isremoved (in whole or in part) E2245, E2246sacrificial layera single thickness of material t
16、hat is inten-tionally deposited (or added) then removed (in whole or inpart) during the micromachining process, to allow freestand-ing microstructures. E2244, E2245, E2246stictionadhesion between the portion of a structural layerthat is intended to be freestanding and its underlying layer.E2245, E22
17、46(residual) strain gradient, sgL1a through-thicknessvariation (of the residual strain) in the structural layer ofinterest before it is released.DISCUSSIONIf the variation through the thickness in the structurallayer is assumed to be linear, it is calculated to be the positivedifference in the resid
18、ual strain between the top and bottom of acantilever divided by its thickness. Directional information is assignedto the value of s. E2245, E2246structural layera single thickness of material present in thefinal MEMS device. E2244, E2245, E2246substratethe thick, starting material (often single crys
19、talsilicon or glass) in a fabrication process that can be used tobuild MEMS devices. E2244, E2245, E2246support regionin a bulk-micromachining process, the areathat marks the end of the suspended structure. E2244,E2245, E2246surface micromachininga MEMS fabrication processwhere micron-scale componen
20、ts are formed on a substrateby the deposition (or addition) and removal (in whole or inpart) of structural and sacrificial layers. E2244, E2245,E2246test structurea component (such as, a fixed-fixed beam orcantilever) that is used to extract information (such as, theresidual strain or the strain gra
21、dient of a layer) about afabrication process. E2244, E2245, E2246transitional edgethe side of a MEMS structure that ischaracterized by a distinctive out-of-plane vertical displace-ment as seen in an interferometric 2-D data trace. E2244,E2245, E2246underlying layer the single thickness of material d
22、irectlybeneath the material of interest.DISCUSSIONThis layer could be the substrate. E2244, E2245,E22464. Keywords4.1 cantilevers; definitions; fixed-fixed beams; interferom-etry; length measurements; microelectromechanical systems;MEMS; polysilicon; residual strain; stiction; strain gradient;termin
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24、t of such rights, are entirely their own responsibility.This standard is subject to revision at any time by the responsible technical committee and must be reviewed every five years andif not revised, either reapproved or withdrawn. Your comments are invited either for revision of this standard or f
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26、n to the ASTM Committee on Standards, at the address shown below.This standard is copyrighted by ASTM International, 100 Barr Harbor Drive, PO Box C700, West Conshohocken, PA 19428-2959,United States. Individual reprints (single or multiple copies) of this standard may be obtained by contacting ASTM at the aboveaddress or at 610-832-9585 (phone), 610-832-9555 (fax), or serviceastm.org (e-mail); or through the ASTM website(www.astm.org). Permission rights to photocopy the standard may also be secured from the ASTM website (www.astm.org/COPYRIGHT/).E2444 1112
