DIN EN ISO 21254-1-2011 Lasers and laser-related equipment - Test methods for laser-induced damage threshold - Part 1 Definitions and general principles (ISO 21254-1 2011) German v.pdf

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1、October 2011 Translation by DIN-Sprachendienst.English price group 12No part of this translation may be reproduced without prior permission ofDIN Deutsches Institut fr Normung e. V., Berlin. Beuth Verlag GmbH, 10772 Berlin, Germany,has the exclusive right of sale for German Standards (DIN-Normen).IC

2、S 31.260!$t|“1819389www.din.deDDIN EN ISO 21254-1Lasers and laser-related equipment Test methods for laser-induced damage threshold Part 1: Definitions and general principles (ISO 21254-1:2011)English translation of DIN EN ISO 21254-1:2011-10Laser und Laseranlagen Prfverfahren fr die laserinduzierte

3、 Zerstrschwelle Teil 1: Begriffe und allgemeine Grundstze (ISO 21254-1:2011)Englische bersetzung von DIN EN ISO 21254-1:2011-10Lasers et quipements associs aux lasers Mthodes dessai du seuil dendommagement provoqu par laser Partie 1: Dfinitions et principes de base (ISO 21254-1:2011)Traduction angla

4、ise de DIN EN ISO 21254-1:2011-10Together with DIN EN ISO 21254-2:2011-10,supersedesDIN EN ISO 11254-1:2000-11andDIN EN ISO 11254-2:2002-10www.beuth.deIn case of doubt, the German-language original shall be considered authoritative.Document comprises pages0 .11922DIN EN ISO 21254-1:2011-10 A comma i

5、s used as the decimal marker. National foreword This standard has been prepared by Technical Committee ISO/TC 172 “Optics and photonics”, Subcommittee SC 9 “Electro-optical systems” in collaboration with Technical Committee CEN/TC 123 “Lasers and photonics” (Secretariat: DIN, Germany). The responsib

6、le German body involved in its preparation was the Normenausschuss Feinmechanik und Optik (Optics and Precision Mechanics Standards Committee), Working Committee NA 027-01-18 AA Laser. EN ISO 21254 consists of the following parts, under the general title Lasers and laser-related equipment Test metho

7、ds for laser-induced damage threshold: Part 1: Definitions and general principles Part 2: Threshold determination Part 3: Assurance of laser power (energy) handling capabilities Part 4: Inspection, detection and measurement Technical Report The DIN Standards corresponding to the International Standa

8、rds referred to in this document are as follows: ISO 11145 DIN EN ISO 11145 ISO 11146-1 DIN EN ISO 11146-1 ISO 11146-2 DIN EN ISO 11146-2 ISO 10110-7 DIN ISO 10110-7 Amendments This standard differs from DIN EN ISO 11254-1:2000-11 and DIN EN ISO 11254-2:2002-10 as follows: a) definitions and general

9、 principles have been combined; b) the 1-on-1 test has been transferred to ISO 11254-2. Previous editions DIN EN ISO 11254-1: 2000-11 DIN EN ISO 11254-2: 2002-10 National Annex NA (informative) Bibliography DIN EN ISO 11145, Optics and photonics Lasers and laser-related equipment Vocabulary and symb

10、ols DIN EN ISO 11146-1, Lasers and laser-related equipment Test methods for laser beam widths, divergence angles and beam propagation ratios Part 1: Stigmatic and simple astigmatic beams DIN EN ISO 11146-2, Lasers and laser-related equipment Test methods for laser beam widths, divergence angles and

11、beam propagation ratios Part 2: General astigmatic beams DIN ISO 10110-7, Optics and photonics Preparation of drawings for optical elements and systems Part 7: Surface imperfection tolerances 2 EUROPEAN STANDARD NORME EUROPENNE EUROPISCHE NORM EN ISO 21254-1 July 2011 ICS 31.260 Supersedes EN ISO 11

12、254-1:2000, EN ISO 11254-2:2001English Version Lasers and laser-related equipment - Test methods for laser-induced damage threshold - Part 1: Definitions and general principles (ISO 21254-1:2011) Lasers et quipements associs aux lasers - Mthodes dessai du seuil dendommagement provoqu par laser - Par

13、tie 1: Dfinitions et principes de base Laser und Laseranlagen - Prfverfahren fr die laserinduzierte Zerstrschwelle - Teil 1: Begriffe und allgemeine Grundstze (ISO 21254-1:2011) This European Standard was approved by CEN on 14 July 2011. CEN members are bound to comply with the CEN/CENELEC Internal

14、Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management Centre or to any CEN

15、member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CEN member into its own language and notified to the CEN-CENELEC Management Centre has the same status as the official version

16、s. CEN members are the national standards bodies of Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Finland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slove

17、nia, Spain, Sweden, Switzerland and United Kingdom. Management Centre: Avenue Marnix 17, B-1000 Brussels 2011 CEN All rights of exploitation in any form and by any means reserved worldwide for CEN national Members. Ref. No. EN ISO 21254-1:2011: EEUROPEAN COMMITTEE FOR STANDARDIZATION COMIT EUROPEN D

18、E NORMALISATION EUROPISCHES KOMITEE FR NORMUNG (ISO 21254-1:2011) Contents Page Foreword .3 Introduction.4 1 Scope5 2 Normative references5 3 Terms and definitions .6 4 Symbols and units of measurement7 5 Sampling.8 6 Test methods .8 6.1 Principle8 6.2 Apparatus.9 6.3 Preparation of specimens.14 6.4

19、 Procedure.14 7 Accuracy.15 8 Test report15 Annex A (informative) Units and scaling of laser-induced damage thresholds.17 2DIN EN ISO 21254-1:2011-10 EN ISO 21254-1:2011 (E) Bibliography1 8Foreword This document (EN ISO 21254-1:2011) has been prepared by Technical Committee ISO/TC 172 Optics and pho

20、tonics” in collaboration with Technical Committee CEN/TC 123 “Lasers and photonics” the secretariat of which is held by DIN. This European Standard shall be given the status of a national standard, either by publication of an identical text or by endorsement, at the latest by January 2012, and confl

21、icting national standards shall be withdrawn at the latest by January 2012. Attention is drawn to the possibility that some of the elements of this document may be the subject of patent rights. CEN and/or CENELEC shall not be held responsible for identifying any or all such patent rights. This docum

22、ent supersedes EN ISO 11254-1:2000, EN ISO 11254-2:2001. According to the CEN/CENELEC Internal Regulations, the national standards organizations of the following countries are bound to implement this European Standard: Austria, Belgium, Bulgaria, Croatia, Cyprus, Czech Republic, Denmark, Estonia, Fi

23、nland, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuania, Luxembourg, Malta, Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland and the United Kingdom. Endorsement notice The text of ISO 21254-1:2011 has been approved by CEN as a

24、 EN ISO 21254-1:2011 without any modification. 3DIN EN ISO 21254-1:2011-10 EN ISO 21254-1:2011 (E) Introduction Optical components can be damaged by laser irradiation of sufficiently high energy or power. At any specified laser irradiation level and operation mode of the laser source, the probabilit

25、y for laser damage is usually higher for the surface of a component than for the bulk. Thus, the limiting value of an optical component is frequently given by the damage threshold of its surface which might be coated to influence the optical properties. Bulk damage is observed if the electrical fiel

26、d strength in the bulk of the component is enhanced by self-focusing, interference, scattering or other effects. Also, imperfections, such as inclusions, dislocations, colour centres or inhomogeneities, can reduce the power-handling capability in the bulk of an optical component. Damage by single la

27、ser pulses is often induced by defects or mechanical stress in the coating, contamination of the surface, or optical absorption, leading to catastrophic heating of the surface. For multiple-pulse operation, not only reversible mechanisms induced by thermal heating and distortion but also irreversibl

28、e damage mechanisms induced by ageing, microdamage, moisture damage and generation or migration of defects are observed. The various parts of this International Standard are concerned with the determination of irreversible damage of the optical surfaces and the bulk of an optical component under the

29、 influence of a laser beam. Depending on the environmental conditions, damage is a function of the material properties and the laser parameters, in particular wavelength, spot size and irradiation duration. This part of ISO 21254 is dedicated to the fundamentals and general principles of the measure

30、ment of laser-induced damage thresholds (LIDTs). On the basis of the apparatus and measurement protocols described in ISO 21254-1, ISO 21254-2 and ISO 21254-3, this part of ISO 21254 outlines procedures for damage testing under different conditions. The protocols for the determination of the 1-on-1

31、and S-on-1 damage thresholds are described in ISO 21254-2. The 1-on-1 test is a damage threshold measurement procedure that uses one shot of laser radiation on each unexposed site on the specimen surface. In contrast to this, the S-on-1 measurement programme is based on a series of pulses with const

32、ant energy density applied to each unexposed site of the specimen surface. This test reflects the operational conditions of the sample in typical applications but, compared to the 1-on-1 measurement protocol, the experimental effort necessary for S-on-1 tests is significantly higher. ISO 21254-3 con

33、centrates on the assurance of the power or energy density handling capability of optical surfaces, leaving samples that pass the test undamaged. ISO/TR 21254-4, which considers damage detection methods and the inspection of tested surfaces, is a Technical Report which complements ISO 21254-1. 4DIN E

34、N ISO 21254-1:2011-10 EN ISO 21254-1:2011 (E) WARNING The extrapolation of damage data can lead to an overestimation of the laser-induced damage threshold. In the case of toxic materials (e.g. ZnSe, GaAs, CdTe, ThF4, chalcogenides, Be, Cr, Ni), this can lead to serious health hazards. See Annex A fo

35、r further comments. 1 Scope This part of ISO 21254 defines terms used in conjunction with, and the general principles of, test methods for determining the laser-induced damage threshold and for the assurance of optical laser components subjected to laser radiation. 2 Normative references The followi

36、ng referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. ISO 10110-7, Optics and photonics Preparation of drawings fo

37、r optical elements and systems Part 7: Surface imperfection tolerances ISO 11145, Optics and photonics Lasers and laser-related equipment Vocabulary and symbols ISO 11146-1, Lasers and laser-related equipment Test methods for laser beam widths, divergence angles and beam propagation ratios Part 1: S

38、tigmatic and simple astigmatic beams ISO 11146-2, Lasers and laser-related equipment Test methods for laser beam widths, divergence angles and beam propagation ratios Part 2: General astigmatic beams ISO 21254-2, Lasers and laser-related equipment Test methods for laser-induced damage threshold Part

39、 2: Threshold determination ISO 21254-3, Lasers and laser-related equipment Test methods for laser-induced damage threshold Part 3: Assurance of laser power (energy) handling capabilities ISO/TR 21254-4, Lasers and laser-related equipment Test methods for laser-induced damage threshold Part 4: Inspe

40、ction, detection and measurement 5DIN EN ISO 21254-1:2011-10 EN ISO 21254-1:2011 (E) 3 Terms and definitions For the purposes of this document, the terms and definitions given in ISO 11145 and the following apply. 3.1 surface damage any permanent laser-radiation-induced change in the characteristics

41、 of the surface of the specimen which can be observed by an inspection technique and at a sensitivity related to the intended operation of the product concerned NOTE Damage may occur on the front surface or the rear surface of the optical component. The damage threshold value for the front surface m

42、ay differ from that for the rear surface. 3.2 bulk damage any permanent laser-radiation-induced change in the characteristics of the bulk of the specimen which can be observed by an inspection technique and at a sensitivity related to the intended operation of the product concerned 3.3 1-on-1 test t

43、est programme that uses one shot of laser radiation on each unexposed site on the specimen surface 3.4 linear power density Fthlinear power density threshold, expressed in watts per centimetre (W/cm), above which damage might occur NOTE The linear power density is applicable for cw and long-pulse op

44、eration. For laser damage considerations, a long pulse is assumed when the thermal transit distance (2Deff)1/2, where D is the thermal diffusivity, is of the same order of size as the test spot diameter dT,eff. 3.5 S-on-1 test test programme that uses a series of pulses with constant energy density

45、on each unexposed site with a short and constant time interval between two successive pulses, where the length of the time interval between the pulses of a series is given by the reciprocal of the pulse repetition rate of the laser source 3.6 number of shots per interrogation site S number of pulses

46、 in a pulse train used in an S-on-1 test 3.7 threshold highest quantity of laser radiation incident upon the optical component for which the extrapolated probability of damage is zero, where the quantity of laser radiation may be expressed as energy density Hth, power density Eth, or linear power de

47、nsity Fth3.8 target plane plane tangential to the surface of the specimen at the point of intersection of the test laser beam axis with the surface of the specimen 3.9 effective area AT,effratio of pulse energy to maximum energy density of the laser pulse in the target plane NOTE For spatial beam pr

48、ofiling perpendicular to the direction of beam propagation and for angles of incidence differing from 0 rad, the cosine of the angle of incidence is included in the calculation of the effective area. 6DIN EN ISO 21254-1:2011-10 EN ISO 21254-1:2011 (E) 3.10 effective beam diameter dT,effdouble the sq

49、uare root of the effective area divided by : T,effT,eff2Ad =(1) 3.11 effective pulse duration effratio of pulse energy to peak pulse power of the pulse 3.12 typical pulse pulse with temporal and spatial shapes that represent the average properties of the pulses forming a pulse series used in an S-on-1 test 3.13 minimum number of pulses Nminnumber of incident pulses necessary to cause detectable damage 3.14 characteristic damage curve representation of the S-on-1 laser-induced damage thres

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