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2、) .3III 8.6052011 State system for ensuring the uniformity of measurements. State verification schedule for means of measuring of theellipsometric angles 201407011 - c68c89(c68 p- s- , - , tg c89 p- s- ) (. - ) - , , , 1- 2- - .2 2.1 -.2.2 :1) , , :- ;- - ;- ;- .2) , , :- ;- ;- ;- .2.3 0 360. - 0 90
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4、1.3.2.3 , - .4 :4.1 0 360 0 90. c68c68 - 0,09 0,5. c68c89 0,06 0,3.4.2 - 0 360. c68c68 0,1 2,0.4.3 0 10800. c68c68 1,0 6,0.2 8.6052011 () 3 8.6052011 001.4:681.782.473:006.354 17.020 84.10:,-, , 8.6052011 . . . . 30.10.2014. 14.11.2014. 60c1808418. . . . 0,93. .-. . 0,75. 72 . . 4660. , 123995 , ., 4.www.gostinfo.ru infogostinfo.ru