GOST 8 605-2011 State system for ensuring the uniformity of measurements State verification schedule for means of measuring of the ellipsometric angles《国家测量统一性保证体系 测量椭圆角度方法的国家鉴定计划》.pdf

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GOST 8 605-2011 State system for ensuring the uniformity of measurements State verification schedule for means of measuring of the ellipsometric angles《国家测量统一性保证体系 测量椭圆角度方法的国家鉴定计划》.pdf_第1页
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GOST 8 605-2011 State system for ensuring the uniformity of measurements State verification schedule for means of measuring of the ellipsometric angles《国家测量统一性保证体系 测量椭圆角度方法的国家鉴定计划》.pdf_第2页
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GOST 8 605-2011 State system for ensuring the uniformity of measurements State verification schedule for means of measuring of the ellipsometric angles《国家测量统一性保证体系 测量椭圆角度方法的国家鉴定计划》.pdf_第3页
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GOST 8 605-2011 State system for ensuring the uniformity of measurements State verification schedule for means of measuring of the ellipsometric angles《国家测量统一性保证体系 测量椭圆角度方法的国家鉴定计划》.pdf_第4页
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GOST 8 605-2011 State system for ensuring the uniformity of measurements State verification schedule for means of measuring of the ellipsometric angles《国家测量统一性保证体系 测量椭圆角度方法的国家鉴定计划》.pdf_第5页
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1、 , ()INTERSTATE COUNCIL FOR STANDARDIZATION, METROLOGY AND CERTIFICATION(ISC)8.6052011, - 1.092 . - 1.22009 . -, . , , 1 - - ( ) - 2 ()3 , (- 29 2011 . 40) : ( 3166) 00497 ( 3166) 00497 BYKZKGMDRUTJUZUA - 4 27 2012 . 1245-8.6052011 - 1 2014 .5 -, - . () . , - - , 2014 -, II 8.60520111 12 .13 24 .2 (

2、) .3III 8.6052011 State system for ensuring the uniformity of measurements. State verification schedule for means of measuring of theellipsometric angles 201407011 - c68c89(c68 p- s- , - , tg c89 p- s- ) (. - ) - , , , 1- 2- - .2 2.1 -.2.2 :1) , , :- ;- - ;- ;- .2) , , :- ;- ;- ;- .2.3 0 360. - 0 90

3、.2.4 - Sc68 0,021 8.6052011 50 . c81c68 0,05. UP: 0,08 2 P = 0,95 50 . - Sc89 0,01 50 . c81c89 0,03. UP: 0,06 2 P = 0,95 50 .2.5 ,.2.6 1- .3 3.1 1- 3.1.1 1- - 0 360 0 90 - 0 360.3.1.2 1- c100 - 0,95 0,07 - 0,04.3.1.3 1- 2- - .3.2 2- 3.2.1 2- 0 360 - 0 90 0 360.3.2.2 2- c100 - 0,95 0,08 0,2 - 0,05 0,

4、1.3.2.3 , - .4 :4.1 0 360 0 90. c68c68 - 0,09 0,5. c68c89 0,06 0,3.4.2 - 0 360. c68c68 0,1 2,0.4.3 0 10800. c68c68 1,0 6,0.2 8.6052011 () 3 8.6052011 001.4:681.782.473:006.354 17.020 84.10:,-, , 8.6052011 . . . . 30.10.2014. 14.11.2014. 60c1808418. . . . 0,93. .-. . 0,75. 72 . . 4660. , 123995 , ., 4.www.gostinfo.ru infogostinfo.ru

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