1、 8.8412013 110 1 - - ( )2 386 3 28 2013 . 1286-4 1.02012 ( 8). ( 1 ) , . () . , (gost.ru) , 2015 , - - II 8.84120131 .12 13 14 .25 .26 .27 .38 39 610 .7III 8.8412013 110 State system for ensuring the uniformity of measurements. Instruments for measurement of exposureand irradiance in the wavelength
2、range 1 to 10 nm. Verification procedure 201502011 ( ) () -, - ( ) ( ) 110 , . 110 , 107, 2 c215 101 , 0,01/2, 20 /2. .2 : 8.5522001 . - -0,030,40 8.7362011 . . . - , 1 , - , . (), () . , , , , .3 , 1.1 8.8412013 1 8.1 + + 8.2 + + 8.3 + + 8.3.1 + + 8.3.2 + + , . 8.3.3 + + -8.3.4 + + + , .4 , 2. 2 ,
3、8.3.1 - 110 - 162-32003 8.552. ( ) 3 %8.3.2 - - 110 162-32003 8.552. 3 %8.3.3 - 162-32003 8.552. 5 %8.3.4 - 162-32003 8.552. 5 %5 , , () , () -.6 () - -. , III, - .2 8.84120137 :- .(20c177 5) C;- (65c177 15) %;- .84104 ;- (220 c177 4) ;- .(50c177 1) .8 8.1 :- () - ;- () -, ;- () -;- ( () -);- , ()-.
4、8.2 :- -;- , -.8.3 8.3.1 () -, , - ( ) () , - 110 . -, ( ) 8.552 - 1 10 . () - , , , UV, 8.552. - 1 10 , - . I(c108) - I(c108) 1 110 . , J(c108) - J(c108), . i- i(c108) (c108) i(c108)=(c108)Ii(c108)Ji(c108) /Iic111(c108)Jic111(c108). (1) (c108). S0 n S0=() ()()( )/SSSnniic108c108c108c45c236c237c238c
5、252c253c254c45c61c22921512121.(2) c810 8.552().3 8.8412013 Sc83 Sc83=(S02+ c8102/3)1/2. (3) - c811 , (c108) S(c108), c811=ES E SES E() () () ()() ()c108c108c108 c108 c108c108c108c108c108c215c215c215c215c242c242ddd 110110d() ()c108c108c108c215c45c242c242S1101101 c215 100, (4) (c108) -;(c108) -.37- (c
6、108)(c108) . 3 E(c108) 450 1,0 c108, E(c108)0,80,91,02,03,04,05,06,07,08,09,010,012,00,1510,2570,3651,0000,8570,6290,4460,3230,2460,1860,1460,1170,077 4 E(c108) 2500 6,0 c108, E(c108)0,91,02,03,04,05,06,07,08,09,010,012,01,0000,8020,1260,04310,01990,01100,00680,00450,00320,00230,00170,00114 8.841201
7、3 5 E(c108) I c108, E(c108)0,91,01,21,31,61,72,02,53,00,0000,0500,2000,1001,0000,2500,0100,0200,000 6 E(c108) II c108,E(c108)0,8030,9921,241,022,54,05,06,07,08,09,010,01,0000,3300,2900,2210,1700,0110,0140,0500,0900,1000,1100,130 7 (c108) IV c108, (c108) c108, (c108)1,01,251,501,752,002,252,502,753,0
8、03,253,503,754,004.254,504,755,000,1750,2260,2630,3360,5840,5040,4600,4740,2990,3940,4890,2920,1610,1460,1750,1020,1095,255,505,756,006,256,506,757,007,257,507,758,008,258,508,758,009,2510,000,0730,0950,1530,4740,8031,0000,9780,8320,7880,8250,6720,4740,3940,3360,2850,3210,2630,1758.3.2 - - 110 . -5 8.8412013 . - I I . = I/I, (5) . , (1)(3). c812 8 %.8.3.3 , . - - . - - . , , 0,01/2 107. I2. . , C S0, (1)(3) K = |1 + I2/I1|. (6) c813, - c813= 100 |K 1|. (7)
