GOST R ISO 14644-5-2005 Cleanrooms and associated controlled environments Part 5 Operations《洁净室和相伴控制环境 第5部分 运营》.pdf

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40、G0AG06G0DG01G2EG01G35G09G0EG0FG03G0BG08G05G0AG08G0DG39G01G1DG04G0DG29G04G03G01G04G11G12G01G05G06G09G14G0CG2CG01G0EG08G27G0DG32G0DG0AG06G17G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01

41、G21G01G21G01G21G01G21G01G21G01G21G01G21G01 G24G2BG0FG06G11G08G29G0DG0AG06G0DG01G1EG01G35G09G0EG0FG03G0BG08G05G0AG08G0DG39G01G2BG0DG0FG09G08G0AG03G11 G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G

42、21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G20G25G2BG0FG06G11G08G29G0DG0AG06G0DG01G60G01G35G09G0EG0FG03G0BG08G05G0AG08G0DG39G01G1EG14G03G10G06G08G0AG03G0FG0AG08G0DG01G08G13G08G0FG16G

43、04G08G0BG03G0AG06G0DG21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G20G3AG2BG0FG06G11G08G29G0DG0AG06G0DG01G61G01G35G09G0EG0FG03G0BG

44、08G05G0AG08G0DG39G01G38G03G14G0DG0FG06G03G11G0CG07G01G0EG08G0FG14G03G14G06G0BG0AG08G0DG01G06G01G0EG0DG0FG0DG04G0BG06G29G0AG08G0DG01G08G13G08G0FG16G04G08G0BG03G0AG06G0DG21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G20G62G2BG0FG06G11G08G29G0DG0AG06G0DG01G63G01G35G

45、09G0EG0FG03G0BG08G05G0AG08G0DG39G01G3FG13G08G0FG1AG03G01G05G06G09G14G0CG2CG01G0EG08G27G0DG32G0DG0AG06G17 G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21

46、G01G21G01G21G01G21G01G21G01G21G01G25G25G2BG0FG06G11G08G29G0DG0AG06G0DG01G5BG01G35G09G0EG0FG03G0BG08G05G0AG08G0DG39G01G1EG0BG0DG04G0DG0AG06G12G01G08G01G09G08G08G14G0BG0DG14G09G14G0BG06G06G01G0AG03G10G06G08G0AG03G11G3DG0AG0CG2CG01G09G14G03G0AG04G03G0FG14G08G0BG01G01G19G08G09G09G06G17G09G1AG08G17G01G1B

47、G0DG04G0DG28G0FG03G10G06G06G01G09G09G0CG11G08G05G0AG0CG27G01G27G0DG29G04G16G0AG03G0FG08G04G0AG0CG27G01G35G0FG0DG15G06G08G0AG03G11G3DG0AG0CG27G39G01G09G14G03G0AG04G03G0FG14G03G27 G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G25G24G64G06G13G11G0

48、6G08G15G0FG03G5EG06G12 G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G

49、21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G21G01G3EG22G17G16G19G18G08G11G08G01G19G16G08G27G28G29G28G28G2AG2BG2CG2DG2EG2EG2BG01G01G01G3EG3AG34G35G34G3DG36G34G2EG08G01G27G0AG08G15G06G2CG01G08G14G

50、0FG03G09G11G12G2CG01G0EG0FG08G27G0CG3CG11G0DG0AG0AG08G09G14G06G01G06G01G09G5EG0DG0FG03G2CG01G04G0DG12G14G0DG11G3DG0AG08G09G14G06G01G05G0DG11G08G0BG0DG1AG03G01G0EG0FG0DG04G65G12G0BG11G12G34G14G09G12G01G09G0EG0DG10G06G03G11G3DG28G0AG0CG0DG01G14G0FG0DG13G08G0BG03G0AG06G12G01G1AG01G05G06G09G14G08G14G0DG