1、 KSKSKSKSKSKSKSK KSKSKS KSKSK KSKS KSK KS KS B ISO 3529 3 3：KS B ISO 3529 3:2008 2008 9 8 http:/www.kats.go.krKS B ISO 3529 3:2008 : ( ) ( ) ( ) ( ) ( ) : (http:/www.standard.go.kr) ： ： 2003 12 15 ： 2008 9 8 2008-0508 ： ： ( 02-509-7290) (http:/www.kats.go.kr). 10 5 , . KS B ISO 3529 3:2008 3： Vacuum
2、 technology Vocabulary Part 3： Vacuum gauages 1981 1 ISO 3529 3, Vacuum technology Vocabulary Part 3： Vacuum gauges . 1 . KS B ISO 3529 1 KS B ISO 3529 2 . 2 2.1 2.1.1 (pressure gauge) 2.1.2 (vacuum gauge) ( ) . 2.1.2.1 (gauge head) 2.1.2.1.1 (nude gauge) . . 2.1.2.2 (gauge control unit) KS B ISO 35
3、29 3:2008 2 2.1.2.2.1 (gauge indicating unit) 2.2 2.2.1 (differential vacuum gauge) 2.2.2 (absolute vacuum gauge) 2.2.3 (total pressure vacuum gauge) . 2.2.4 , (partial pressure vacuum gauge, partial pressure analyzer) . . 2.3 2.3.1 (pressure range of a vacuum gauge) . . 2.3.2 , (sensitivity coeffic
4、ient, sensitivity) . . 2.3.3 (relative sensitivity factor) 2.3.4 (ionization gauge coefficient) . . KS B ISO 3529 3:2008 3 2.3.5 (equivalent nitrogen pressure) , 2.3.6 X (x-ray limit) X 2.4 2.4.1 2.4.1.1 (liquid level manometer) (： ) , U . . 2.4.1.2 (elastic element gauge) . ( ) ( ) . ： , 2.4.1.3 (c
5、ompression gauge) . , pV T . ： 2.4.1.4 (pressure balance) 2.4.2 2.4.2.1 (viscosity gauge) . . ： , 2.4.2.2 (thermal conductivity gauge) . . ： , , , KS B ISO 3529 3:2008 4 2.4.2.3 (thermo-molecular gauge) . . ： , 2.4.3 2.4.3.0 (ionization vacuum gauge) . . 2.4.3.1 (radioactive ionization gauge) 2.4.3.
6、2 (cold cathode ionization gauge) . . . 2.4.3.2.1 (Penning gauge) . , . . 2.4.3.2.2 (cold cathode magnetron gauge) . “ ” . 2.4.3.2.3 (discharge tube indicator) 2.4.3.3 (hot cathode ionization gauge) 2.4.3.3.1 3 (triode gauge) 3 . 2.4.3.3.2 (high pressure ionization gauge) KS B ISO 3529 3:2008 5 3 ,
7、2.4.3.3.3 (Bayard Alpert gauge) , X 2.4.3.3.4 (modulator gauge) 2.4.3.3.5 (suppressor gauge) 2 X 2.4.3.3.6 (extractor gauge) X 2.4.3.3.7 (orbitron gauge) . . X . 2.4.3.3.8 2 (twin-wire oscillator guage) 2.4.3.3.9 (hot cathode magnetron gauge) . . 2.5 2.5.1 (mass spectrometer) , , . . KS B ISO 3529 3
8、2008 6 2.5.2 2.5.2.1 (radio frequency mass spectrometer) 2.5.2.2 4 (quadrupole mass spectrometer) 4 4 / 2.5.2.3 (monopole mass spectrometer) L 4 1/4 L / 2.5.3 2.5.3.1 (magnetic deflection mass spectrometer) 2.5.3.1.1 (double focusing mass spectrometer) 2.5.3.1.2 (trochoidal focusing mass spectromet
9、er) / 2.5.3.2 (omegatron mass spectrometer) 2.5.4 2.5.4.1 (time of flight mass spectrometer) . / . KS B ISO 3529 3:2008 7 A absolute vacuum gauge 2.2.2 Alpert Bayard Alpert gauge 2.4.3.3.3 B balance pressure balance 2.4.1.4 Bayard Alpert gauge 2.4.3.3.3 bimetal gauge 2.4.2.2 Bourdon gauge 2.4.1.2 C
10、cathode cold cathode ionization gauge 2.4.3.2 hot cathode ionization gauge 2.4.3.3 hot cathode magnetron gauge 2.4.3.3.9 coefficient ionization gauge coefficient 2.3.4 sensitivity coefficient 2.3.2 cold cathode ionization gauge 2.4.3.2 cold cathode magnetron gauge 2.4.3.2.2 compression gauge 2.4.1.3
11、 control gauge control unit 2.1.2.2 D deflection magnetic deflection mass spectrometer 2.5.3.1 diamagnetic levitation thermo-molecular gauge 2.4.2.3 diaphragm gauge 2.4.1.2 differential vacuum gauge 2.2.1 discharge tube indicator 2.4.3.2.3 double focusing mass spectrometer 2.5.3.1.1 E elastic elemen
12、t gauge 2.4.1.2 equivalent nitrogen pressure 2.3.5 extractor gauge 2.4.3.3.6 F factor relative sensitivity factor 2.3.3 focusing double focusing mass spectrometer 2.5.3.1.1 KS B ISO 3529 3:2008 8 trochoidal mass spectrometer 2.5.3.1.2 frequency radio frequency mass spectrometer 2.5.2.1 G gauge(ioniz
13、ation gauge, manometer, vacuum gauge ) ionization gauge coefficient 2.3.4 Bayard Alpert gauge 2.4.3.3.3 bent beam gauge 2.4.3.3.7 bimetal gauge 2.4.2.2 Bourdon gauge 2.4.1.2 cold cathode ionization gauge 2.4.3.2 cold cathode magnetron gauge 2.4.3.2.2 compression gauge 2.4.1.3 decrement gauge 2.4.2.1
14、 diamagnetic levitation thermo-molecular gauge 2.4.2.3 diaphragm gauge 2.4.1.2 elastic element gauge 2.4.1.2 extractor gauge 2.4.3.3.6 high pressure ionization gauge 2.4.3.3.2 hot cathode ionization gauge 2.4.3.3 hot cathode magnetron gauge 2.4.3.3.9 inverted magnetron gauge 2.4.3.2.2 ionization vac
15、uum gauge 2.4.3.0 Knudsen gauge 2.4.2.3 McLeod gauge 2.4.1.3 modulator gauge 2.4.3.3.4 molecular drag gauge 2.4.2.1 nude gauge 2.1.2.1.1 orbitron gauge 2.4.3.3.7 Penning gauge 2.4.3.2.1 Pirani gauge 2.4.2.2 pressure gauge 2.1.1 radioactive ionization gauge 2.4.3.1 suppressor gauge 2.4.3.3.5 thermal
16、conductivity gauge 2.4.2.2 thermistor gauge 2.4.2.2 thermocouple gauge 2.4.2.2 thermo-molecular gauge 2.4.2.3 triode gauge 3 2.4.3.3.1 twin-wire oscillator gauge 2 2.4.3.3.8 vacuum gauge 2.1.2 viscosity gauge 2.4.2.1 gauge control unit 2.1.2.2 gauge head 2.1.2.1 gauge indicating unit 2.1.2.2.1 KS B
17、ISO 3529 3:2008 9 H head gauge head 2.1.2.1 high pressure ionization gauge 2.4.3.3.2 hot cathode ionization gauge 2.4.3.3 hot cathode magnetron gauge 2.4.3.3.9 I indicating gauge indicating unit 2.1.2.2.1 indicator discharge tube indicator 2.4.3.2.3 inverted magnetron gauge 2.4.3.2.2 ionization gauge cold cathode ionization gauge 2.4.3.2 high pressure ionization gauge 2.4.3.3.2 hot cathode ionization gauge 2.4.3.3 radioactive ionization gauge 2.4.3.1 ionization gauge coefficient 2.3.4 ionization vacuum gauge 2.4.3.0 K Knudsen gauge
