1、BSI Standards PublicationSemiconductor devices Micro-electromechanical devicesPart 20: GyroscopesBS EN 62047-20:2014National forewordThis British Standard is the UK implementation of EN 62047-20:2014. It isidentical to IEC 62047-20:2014.The UK participation in its preparation was entrusted to Techni
2、calCommittee EPL/47, Semiconductors.A list of organizations represented on this committee can be obtained onrequest to its secretary.This publication does not purport to include all the necessary provisions ofa contract. Users are responsible for its correct application. The British Standards Instit
3、ution 2014.Published by BSI Standards Limited 2014ISBN 978 0 580 77433 1ICS 31.080.99Compliance with a British Standard cannot confer immunity fromlegal obligations.This British Standard was published under the authority of theStandards Policy and Strategy Committee on 31 October 2014.Amendments/cor
4、rigenda issued since publicationDate Text affectedBRITISH STANDARDBS EN 62047-20:2014EUROPEAN STANDARDNORME EUROPENNEEUROPISCHE NORMEN 62047-20 September 2014 ICS 31.080.99 English Version Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes (IEC 62047-20:2014) Dispositifs s
5、emiconducteurs - Dispositifsmicrolectromcaniques - Partie 20: Gyroscopes (CEI 62047-20:2014) Halbleiterbauelemente - Bauelemente derMikrosystemtechnik - Teil 20: Gyroskope (IEC 62047-20:2014) This European Standard was approved by CENELEC on 2014-07-31. CENELEC members are bound to comply with the C
6、EN/CENELEC Internal Regulations which stipulate the conditions for giving this European Standard the status of a national standard without any alteration. Up-to-date lists and bibliographical references concerning such national standards may be obtained on application to the CEN-CENELEC Management C
7、entre or to any CENELEC member. This European Standard exists in three official versions (English, French, German). A version in any other language made by translation under the responsibility of a CENELEC member into its own language and notified to the CEN-CENELEC Management Centre has the same st
8、atus as the official versions.CENELEC members are the national electrotechnical committees of Austria, Belgium, Bulgaria, Croatia, Cyprus, the Czech Republic, Denmark, Estonia, Finland, Former Yugoslav Republic of Macedonia, France, Germany, Greece, Hungary, Iceland, Ireland, Italy, Latvia, Lithuani
9、a, Luxembourg, Malta, the Netherlands, Norway, Poland, Portugal, Romania, Slovakia, Slovenia, Spain, Sweden, Switzerland,Turkey and the United Kingdom. European Committee for Electrotechnical Standardization Comit Europen de Normalisation ElectrotechniqueEuropisches Komitee fr Elektrotechnische Norm
10、ung CEN-CENELEC Management Centre: Avenue Marnix 17, B-1000 Brussels 2014 CENELEC All rights of exploitation in any form and by any means reserved worldwide for CENELEC Members. Ref. No. EN 62047-20:2014 E EN 62047-20:2014 - 2 - Foreword The text of document 47F/188/FDIS, future edition 1 of IEC 620
11、47-20, prepared by SC 47F “Microelectromechanical systems” of IEC/TC 47 “Semiconductor devices“ was submitted to the IEC-CENELEC parallel vote and approved by CENELEC as EN 62047-20:2014. The following dates are fixed: latest date by which the document has to be implemented at national level by publ
12、ication of an identical national standard or by endorsement (dop) 2015-04-30 latest date by which the national standards conflicting with the document have to be withdrawn (dow) 2017-07-31 Attention is drawn to the possibility that some of the elements of this document may be the subject of patent r
13、ights. CENELEC and/or CEN shall not be held responsible for identifying any or all such patent rights. Endorsement notice The text of the International Standard IEC 62047-20:2014 was approved by CENELEC as a European Standard without any modification. BS EN 62047-20:2014 2 IEC 62047-20:2014 IEC 2014
14、 CONTENTS 1 Scope 6 2 Normative references 6 3 Terms and definitions 6 4 Essential ratings and characteristics 6 4.1 Categorization of gyro . 6 4.2 Absolute maximum ratings 7 4.3 Normal operating rating 8 4.4 Characteristics 8 5 Measuring methods . 10 5.1 Scale factor 10 5.1.1 Purpose . 10 5.1.2 Mea
15、suring circuit (circuit diagram) . 10 5.1.3 Measuring principle . 12 5.1.4 Measurement procedures 21 5.1.5 Specified conditions . 23 5.2 Cross axis sensitivity 24 5.2.1 Purpose . 24 5.2.2 Measuring circuit (circuit diagram) . 24 5.2.3 Principle of measurement 25 5.2.4 Precautions to be observed duri
16、ng the measurements of the angular rate applied . 27 5.2.5 Measurement procedures 27 5.2.6 Specified conditions . 27 5.3 Bias 28 5.3.1 Purpose . 28 5.3.2 Measuring circuit . 28 5.3.3 Principle of measurement 30 5.3.4 Measurement procedures 35 5.3.5 Specified conditions . 37 5.4 Output noise . 38 5.4
17、.1 Purpose . 38 5.4.2 Measuring circuit . 38 5.4.3 Principle of measurement 39 5.4.4 Precautions during measurement . 40 5.4.5 Measurement procedures 40 5.4.6 Specified conditions . 43 5.5 Frequency band 43 5.5.1 Purpose . 43 5.5.2 Measuring circuit . 43 5.5.3 Principle of measurement 45 5.5.4 Preca
18、utions during measurement . 47 5.5.5 Measurement procedure 47 5.5.6 Specified conditions . 49 5.6 Resolution 49 5.6.1 Purpose . 49 BS EN 62047-20:2014IEC 62047-20:2014 IEC 2014 3 5.6.2 Measuring circuit . 49 5.6.3 Principle of measurement 49 5.6.4 Measurement procedures 50 5.6.5 Specified conditions
19、 . 51 Annex A (informative) Accuracy of measured value of gyro characteristics 52 A.1 General . 52 A.2 Angle and angular rate 52 A.3 Example of angular deviation occurring after calibration 52 Bibliography 53 Figure 1 Example of measuring circuit . 11 Figure 2 Example of wiring configuration 12 Figu
20、re 3 Example of measurement data when the angular rate is applied 13 Figure 4 Example of scale factor data at each temperature 15 Figure 5 Example of relationship between scale factor and scale factor temperature coefficient at each temperature . 16 Figure 6 Example of measurement of ratiometric err
21、or for the scale factor . 17 Figure 7 Example measurement of scale factor stability . 19 Figure 8 Example of measurement of scale factor symmetry 20 Figure 9 Measuring circuit for cross axis sensitivity 25 Figure 10 Principle of measurement for cross axis sensitivity . 26 Figure 11 Measuring circuit
22、 1 for bias 29 Figure 12 Measuring circuit 2 for bias 30 Figure 13 Example measurement of ratiometric error for bias 32 Figure 14 Bias temperature sensitivity and bias hysteresis. 34 Figure 15 Bias linear acceleration sensitivity 35 Figure 16 Output noise measuring system . 39 Figure 17 Example of w
23、iring configuration for output noise. 39 Figure 18 Frequency power spectrums. 40 Figure 19 Angular random walk 41 Figure 20 Bias instability and Allan variance curve . 42 Figure 21 Measuring circuit for frequency response . 44 Figure 22 Example of wiring configuration for frequency response . 45 Fig
24、ure 23 Frequency response characteristics . 46 Figure 24 Gain peak response characteristics 46 Figure 25 Calibration of frequency response 48 Table 1 Categories of gyro . 7 Table 2 Absolute maximum ratings 7 Table 3 Normal operating ratings . 8 Table 4 Characteristics 9 Table 5 Specified condition f
25、or measurement of scale factor 23 Table 6 Specified conditions for the measurement of bias 37 Table 7 Specified condition for the measurement of frequency band 49 Table 8 Specified condition for the measurement of resolution . 51 BS EN 62047-20:2014 6 IEC 62047-20:2014 IEC 2014 SEMICONDUCTOR DEVICES
26、 MICRO-ELECTROMECHANICAL DEVICES Part 20: Gyroscopes 1 Scope This part of IEC 62047 specifies terms and definitions, ratings and characteristics, and measuring methods of gyroscopes. Gyroscopes are primarily used for consumer, general industries and aerospace applications. MEMS and semiconductor las
27、ers are widely used for device technology of gyroscopes. Hereafter, gyroscope is referred to as gyro. 2 Normative references The following documents, in whole or in part, are normatively referenced in this document and are indispensable for its application. For dated references, only the edition cit
28、ed applies. For undated references, the latest edition of the referenced document (including any amendments) applies. None 3 Terms and definitions For the purposes of this document, the following terms and definitions apply. 3.1 rotating table rate table rotating tool on which a gyro is loaded durin
29、g measurement 3.2 earth rate angular rate generated in inertial space due to the rotation of the earth Note 1 to entry: When the angular rate in inertial space is defined as stellar day 23 hours, 56 minutes, a reference of 4,098 903 691 seconds is obtained as specified by the International Earth Rot
30、ation and Reference Systems Service (IERS) and therefore, the angular rate of Earth in inertial space is approximately 15,04 /h. For details of the definition, refer to the IERS website (http:/www.iers.org). 3.3 scale factor ratio of gyro output voltage or output digital signal versus the rotating a
31、ngular rate being applied, described in unit: V/(/s) or bit/(/s ) 4 Essential ratings and characteristics 4.1 Categorization of gyro Table 1 shows uses of gyro categorized by application fields. BS EN 62047-20:2014IEC 62047-20:2014 IEC 2014 7 Table 1 Categories of gyro Category Contents 1 primarily
32、for consumer use where variations of bias are not specified 2 primarily for industrial use where designing with appropriate range of values of variations of bias 3 primarily for aerospace use where designing with detectable function of the earth rate 4.2 Absolute maximum ratings Table 2 describes ab
33、solute maximum ratings of gyro. The following items listed in the table shall be described in the specification, unless otherwise stated in the relevant procurement specifications. Stresses over these limits can be one of the causes of permanent damage to the devices. Table 2 Absolute maximum rating
34、s Item no Absolute maximum ratings Category Specification Unit Remarks 1 2 3 min typ max 4.2.1 Storage temperature range x x x x x C 4.2.2 Operating temperature range x x x x x C 4.2.3 Storage humidity range % Moisture absorption management level (for example, see levels specified in Table 5-1 “Mois
35、ture Sensitivity Levels“ of page 7 in IPC/JEDEC J-STD-020C, 11) for reflow soldering shall be specified. Those descriptions shall not be provided to devices applied with no reflow soldering process and/or hermetic seal packaging process. 4.2.4 Mechanical shock in operating state x x x x m/s2Maximum
36、limiting value of mechanical shock which does not cause permanent damage to devices under an appropriate operating state. Acceleration, times and wave forms shall be specified. 4.2.5 Mechanical shock in non operating state x x x x m/s2Maximum limiting value of mechanical shock which does not cause p
37、ermanent damage to devices under an appropriate non-operating state. Acceleration, times and wave forms shall be specified. 4.2.6 Mechanical vibration in operating state x x x x m/s2Maximum limiting value of mechanical vibration acceleration and frequency which does not cause permanent damage to dev
38、ices under an appropriate operating state. 4.2.7 Mechanical vibration in non operating state x x x x m/s2Maximum limiting value of mechanical vibration acceleration and frequency which does not cause permanent damage to devices under an appropriate non-operating state. 4.2.8 Angular rate limit x x x
39、 x /s Maximum limiting value of angular rate which does not cause permanent damage to devices under an appropriate operating state. _ 1Numbers in square brackets refer to the Bibliography. BS EN 62047-20:2014 8 IEC 62047-20:2014 IEC 2014 Item no Absolute maximum ratings Category Specification Unit R
40、emarks 1 2 3 min typ max 4.2.9 Angular acceleration limit x x x x /s2Maximum limiting value of angular acceleration which does not cause permanent damage to devices under an appropriate operating state. 4.2.10 Maximum supply voltage x x x x V Maximum limiting value of supply voltage which does not c
41、ause permanent damage to devices. 4.2.11 Maximum supply current x A Maximum limiting value of supply current which does not cause permanent damage to devices. This limiting value shall be specified only for a kind of constant current driving devices. NOTE x: mandatory, blank: optional 4.3 Normal ope
42、rating rating Table 3 describes normal operating ratings of gyro. The following items should be described in the specification, unless otherwise stated in the relevant procurement specifications. These conditions are recommended to keep specified characteristics in stable state during operations of
43、applying devices. Table 3 Normal operating ratings Item no. Normal operating ratings Category Specification Unit Remarks 1 2 3 min typ max 4.3.1 Guarantee operating temperature range x x x x x C 4.3.2 Guarantee operating humidity range x x x x % 4.3.3 Supply voltage range x x x x x x V 4.3.4 Current
44、 consumption x x x x A 4.3.5 Start up current x x A 4.3.6 Power supply ripple requirement x x Vpp 4.3.7 Other environmental condition x x Recommended ranges of appropriate indexes of environmental conditions (such as conditions of electromagnetic environments, air pressure) specified as a specified
45、minimum value to maximum value. 4.3.8 Overload recovering time x x s Maximum value of overload recovering time in the range of measurement less than maximum rating. NOTE x: mandatory, blank: optional 4.4 Characteristics Table 4 describes characteristics of gyro. BS EN 62047-20:2014IEC 62047-20:2014
46、IEC 2014 9 Table 4 Characteristics Item no Characteristics Category Specification Unit Remarks 1 2 3 min typ max 4.4.1 Measurement range x x x x /s Angular rate measuring range for guarantee of performance 4.4.2 Nominal scale factor x x x x V/(/s) or bit/(/s) Nominal scale factor is also called as s
47、tandard sensitivity. 4.4.3 Initial scale factor variation x x x x % Minimum and maximum value of variation from standard sensitivity at a specified temperature 4.4.4 Scale factor variation with temperature or Temperature coefficient of scale factor x x x x % Minimum and maximum value of standard sen
48、sitivity under a specified variation in temperature 4.4.5 Ratiometric error for scale factor x x % Maximum value of error of sensitivity applying voltage fluctuation caused by operating instability of applying electric power supply 4.4.6 Linearity x % 4.4.7 Scale factor stability n x x A typical val
49、ue of stability of sensitivity under a specified definite input voltage value 4.4.8 Scale factor symmetry n x x A typical value of asymmetry of sensitivity defined as a ratio of the sensitivity applying plus value of a specified input voltage to minus value of a specified input voltage, see 5.1.3.8. 4.4.9 Cross axis sensitivity x x % Maximum value of sensitivity of cross axis (see 5.2.3 Principle of measur
