IEC 62435-5-2017 Electronic components - Long-term storage of electronic semiconductor devices - Part 5 Die and wafer devices《电子元件 电子半导体设备的长期储存 第5部分 晶粒和晶元设备》.pdf

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IEC 62435-5-2017 Electronic components - Long-term storage of electronic semiconductor devices - Part 5 Die and wafer devices《电子元件 电子半导体设备的长期储存 第5部分 晶粒和晶元设备》.pdf_第1页
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1、 IEC 62435-5 Edition 1.0 2017-01 INTERNATIONAL STANDARD NORME INTERNATIONALE Electronic components Long-term storage of electronic semiconductor devices Part 5: Die and wafer devices Composants lectroniques Stockage de longue dure des dispositifs lectroniques semiconducteurs Partie 5: Dispositifs de

2、 puces et plaquettes IEC 62435-5:2017-01(en-fr) THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright 2017 IEC, Geneva, Switzerland All rights reserved. Unless otherwise specified, no part of this publication may be reproduced or utilized in any form or by any means, electronic or mechanical, including

3、photocopying and microfilm, without permission in writing from either IEC or IECs member National Committee in the country of the requester. If you have any questions about IEC copyright or have an enquiry about obtaining additional rights to this publication, please contact the address below or you

4、r local IEC member National Committee for further information. Droits de reproduction rservs. Sauf indication contraire, aucune partie de cette publication ne peut tre reproduite ni utilise sous quelque forme que ce soit et par aucun procd, lectronique ou mcanique, y compris la photocopie et les mic

5、rofilms, sans laccord crit de lIEC ou du Comit national de lIEC du pays du demandeur. Si vous avez des questions sur le copyright de lIEC ou si vous dsirez obtenir des droits supplmentaires sur cette publication, utilisez les coordonnes ci-aprs ou contactez le Comit national de lIEC de votre pays de

6、 rsidence. IEC Central Office Tel.: +41 22 919 02 11 3, rue de Varemb Fax: +41 22 919 03 00 CH-1211 Geneva 20 infoiec.ch Switzerland www.iec.ch About the IEC The International Electrotechnical Commission (IEC) is the leading global organization that prepares and publishes International Standards for

7、 all electrical, electronic and related technologies. About IEC publications The technical content of IEC publications is kept under constant review by the IEC. Please make sure that you have the latest edition, a corrigenda or an amendment might have been published. IEC Catalogue - webstore.iec.ch/

8、catalogue The stand-alone application for consulting the entire bibliographical information on IEC International Standards, Technical Specifications, Technical Reports and other documents. Available for PC, Mac OS, Android Tablets and iPad. IEC publications search - www.iec.ch/searchpub The advanced

9、 search enables to find IEC publications by a variety of criteria (reference number, text, technical committee,). It also gives information on projects, replaced and withdrawn publications. IEC Just Published - webstore.iec.ch/justpublished Stay up to date on all new IEC publications. Just Published

10、 details all new publications released. Available online and also once a month by email. Electropedia - www.electropedia.org The worlds leading online dictionary of electronic and electrical terms containing 20 000 terms and definitions in English and French, with equivalent terms in 16 additional l

11、anguages. Also known as the International Electrotechnical Vocabulary (IEV) online. IEC Glossary - std.iec.ch/glossary 65 000 electrotechnical terminology entries in English and French extracted from the Terms and Definitions clause of IEC publications issued since 2002. Some entries have been colle

12、cted from earlier publications of IEC TC 37, 77, 86 and CISPR. IEC Customer Service Centre - webstore.iec.ch/csc If you wish to give us your feedback on this publication or need further assistance, please contact the Customer Service Centre: csciec.ch. A propos de lIEC La Commission Electrotechnique

13、 Internationale (IEC) est la premire organisation mondiale qui labore et publie des Normes internationales pour tout ce qui a trait llectricit, llectronique et aux technologies apparentes. A propos des publications IEC Le contenu technique des publications IEC est constamment revu. Veuillez vous ass

14、urer que vous possdez ldition la plus rcente, un corrigendum ou amendement peut avoir t publi. Catalogue IEC - webstore.iec.ch/catalogue Application autonome pour consulter tous les renseignements bibliographiques sur les Normes internationales, Spcifications techniques, Rapports techniques et autre

15、s documents de lIEC. Disponible pour PC, Mac OS, tablettes Android et iPad. Recherche de publications IEC - www.iec.ch/searchpub La recherche avance permet de trouver des publications IEC en utilisant diffrents critres (numro de rfrence, texte, comit dtudes,). Elle donne aussi des informations sur l

16、es projets et les publications remplaces ou retires. IEC Just Published - webstore.iec.ch/justpublished Restez inform sur les nouvelles publications IEC. Just Published dtaille les nouvelles publications parues. Disponible en ligne et aussi une fois par mois par email. Electropedia - www.electropedi

17、a.org Le premier dictionnaire en ligne de termes lectroniques et lectriques. Il contient 20 000 termes et dfinitions en anglais et en franais, ainsi que les termes quivalents dans 16 langues additionnelles. Egalement appel Vocabulaire Electrotechnique International (IEV) en ligne. Glossaire IEC - st

18、d.iec.ch/glossary 65 000 entres terminologiques lectrotechniques, en anglais et en franais, extraites des articles Termes et Dfinitions des publications IEC parues depuis 2002. Plus certaines entres antrieures extraites des publications des CE 37, 77, 86 et CISPR de lIEC. Service Clients - webstore.

19、iec.ch/csc Si vous dsirez nous donner des commentaires sur cette publication ou si vous avez des questions contactez-nous: csciec.ch. IEC 62435-5 Edition 1.0 2017-01 INTERNATIONAL STANDARD NORME INTERNATIONALE Electronic components Long-term storage of electronic semiconductor devices Part 5: Die an

20、d wafer devices Composants lectroniques Stockage de longue dure des dispositifs lectroniques semiconducteurs Partie 5: Dispositifs de puces et plaquettes INTERNATIONAL ELECTROTECHNICAL COMMISSION COMMISSION ELECTROTECHNIQUE INTERNATIONALE ICS 31.020 ISBN 978-2-8322-3837-0 Registered trademark of the

21、 International Electrotechnical Commission Marque dpose de la Commission Electrotechnique Internationale Warning! Make sure that you obtained this publication from an authorized distributor. Attention! Veuillez vous assurer que vous avez obtenu cette publication via un distributeur agr. 2 IEC 62435-

22、5:2017 IEC 2017 CONTENTS FOREWORD . 4 INTRODUCTION . 6 1 Scope 8 2 Normative references 8 3 Terms, definitions and abbreviated terms 8 3.1 Terms and definitions 8 3.2 Abbreviations 9 4 Storage requirements 9 4.1 General . 9 4.2 Assembly data 9 4.3 Prerequisite for storage. 9 4.4 Damage to die produc

23、ts during long-term storage . 9 4.5 Mechanical storage conditions 10 4.6 Long-term storage environment 10 4.7 Recommended inert atmosphere purity . 11 4.8 Chemical contamination 11 4.9 Vacuum packing . 11 4.9.1 General . 11 4.9.2 Vacuum dry pack . 11 4.10 Positive pressure systems for packing 11 4.1

24、1 Use of packing material having sacrificial properties . 11 4.12 Use of bio-degradable material . 12 4.13 Plasma cleaning . 12 4.14 Electrical effects . 12 4.15 Protection from radiation . 12 4.16 Periodic qualification of stored die products 12 5 Long-term storage failure mechanisms 13 6 LTS conce

25、rns, method, verification and limitations 13 6.1 General . 13 6.2 Wafers 13 6.3 Bare dice 14 7 Deterioration mechanisms specific to bare die and wafers . 15 7.1 Wire bondability 15 7.2 Staining 15 7.3 Topside delamination 16 8 Specific handling concerns 16 8.1 Die on wafer film frames . 16 8.2 Devic

26、es and dice embossed or punched tape storage . 16 8.3 Handling damage 16 Annex A (informative) Audit checklist . 17 Bibliography 20 IEC 62435-5:2017 IEC 2017 3 Table 1 LTS exposure concerns for wafers 14 Table 2 LTS exposure concerns for bare dice 15 Table A.1 Planning checklist 17 4 IEC 62435-5:201

27、7 IEC 2017 INTERNATIONAL ELECTROTECHNICAL COMMISSION _ ELECTRONIC COMPONENTS LONG-TERM STORAGE OF ELECTRONIC SEMICONDUCTOR DEVICES Part 5: Die and wafer devices FOREWORD 1) The International Electrotechnical Commission (IEC) is a worldwide organization for standardization comprising all national ele

28、ctrotechnical committees (IEC National Committees). The object of IEC is to promote international co-operation on all questions concerning standardization in the electrical and electronic fields. To this end and in addition to other activities, IEC publishes International Standards, Technical Specif

29、ications, Technical Reports, Publicly Available Specifications (PAS) and Guides (hereafter referred to as “IEC Publication(s)”). Their preparation is entrusted to technical committees; any IEC National Committee interested in the subject dealt with may participate in this preparatory work. Internati

30、onal, governmental and non- governmental organizations liaising with the IEC also participate in this preparation. IEC collaborates closely with the International Organization for Standardization (ISO) in accordance with conditions determined by agreement between the two organizations. 2) The formal

31、 decisions or agreements of IEC on technical matters express, as nearly as possible, an international consensus of opinion on the relevant subjects since each technical committee has representation from all interested IEC National Committees. 3) IEC Publications have the form of recommendations for

32、international use and are accepted by IEC National Committees in that sense. While all reasonable efforts are made to ensure that the technical content of IEC Publications is accurate, IEC cannot be held responsible for the way in which they are used or for any misinterpretation by any end user. 4)

33、In order to promote international uniformity, IEC National Committees undertake to apply IEC Publications transparently to the maximum extent possible in their national and regional publications. Any divergence between any IEC Publication and the corresponding national or regional publication shall

34、be clearly indicated in the latter. 5) IEC itself does not provide any attestation of conformity. Independent certification bodies provide conformity assessment services and, in some areas, access to IEC marks of conformity. IEC is not responsible for any services carried out by independent certific

35、ation bodies. 6) All users should ensure that they have the latest edition of this publication. 7) No liability shall attach to IEC or its directors, employees, servants or agents including individual experts and members of its technical committees and IEC National Committees for any personal injury

36、, property damage or other damage of any nature whatsoever, whether direct or indirect, or for costs (including legal fees) and expenses arising out of the publication, use of, or reliance upon, this IEC Publication or any other IEC Publications. 8) Attention is drawn to the Normative references cit

37、ed in this publication. Use of the referenced publications is indispensable for the correct application of this publication. 9) Attention is drawn to the possibility that some of the elements of this IEC Publication may be the subject of patent rights. IEC shall not be held responsible for identifyi

38、ng any or all such patent rights. International Standard IEC 62435-5 has been prepared by IEC technical committee 47: Semiconductor devices. The text of this standard is based on the following documents: FDIS Report on voting 47/2328/FDIS 47/2351/RVD Full information on the voting for the approval o

39、f this International Standard can be found in the report on voting indicated in the above table. This document has been drafted in accordance with the ISO/IEC Directives, Part 2. IEC 62435-5:2017 IEC 2017 5 A list of all parts in the IEC 62435 series, published under the general title Electronic com

40、ponents Long-term storage of electronic semiconductor devices, can be found on the IEC website. The committee has decided that the contents of this document will remain unchanged until the stability date indicated on the IEC website under “http:/webstore.iec.ch“ in the data related to the specific d

41、ocument. At this date, the document will be reconfirmed, withdrawn, replaced by a revised edition, or amended. 6 IEC 62435-5:2017 IEC 2017 INTRODUCTION This document applies to the long-duration storage of electronic components. This is a document for long-term storage (LTS) of electronic devices dr

42、awing on the best long- term storage practices currently known. For the purposes of this document, LTS is defined as any device storage whose duration may be more than 12 months for product scheduled for long duration storage. While intended to address the storage of unpackaged semiconductors and pa

43、ckaged electronic devices, nothing in this document precludes the storage of other items under the storage levels defined herein. Although it has always existed to some extent, obsolescence of electronic components and particularly of integrated circuits, has become increasingly intense over the las

44、t few years. Indeed, with the existing technological boom, the commercial life of a component has become very short compared with the life of industrial equipment such as that encountered in the aeronautical field, the railway industry or the energy sector. The many solutions enabling obsolescence t

45、o be resolved are now identified. However, selecting one of these solutions should be preceded by a case-by-case technical and economic feasibility study, depending on whether storage is envisaged for field service or production, for example: remedial storage as soon as components are no longer mark

46、eted; preventive storage anticipating declaration of obsolescence. Taking into account the expected life of some installations, sometimes covering several decades, the qualification times, and the unavailability costs, which can also be very high, the solution to be adopted to resolve obsolescence s

47、hould often be rapidly implemented. This is why the solution retained in most cases consists in systematically storing components which are in the process of becoming obsolescent. The technical risks of this solution are, a priori, fairly low. However, it requires perfect mastery of the implemented

48、process and especially of the storage environment, although this mastery becomes critical when it comes to long-term storage. All handling, protection, storage and test operations are recommended to be performed according to the state of the art. The application of the approach proposed in this stan

49、dard in no way guarantees that the stored components are in perfect operating condition at the end of this storage. It only comprises a means of minimizing potential and probable degradation factors. Some electronic device users have the need to store electronic devices for long periods of time. Lifetime buys are commonly made to support production runs of assemblies that well exceed the production timeframe of its

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