1、- MIL- H D BK-4 07 3 1 JANUARY 1972 MILITARY STANDARDIZATION HANDBOOK CONTAMINATION CONTROL 136943 TECHNOLOGY PRECISION CLEANING METHODS AND PROCEDURES I- Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-HDBK-407 Contaminati on Control Techno1
2、ogj Precision Cleaning Methods and Procedures 31 January 1972 1. Comand in accordance wi th es tab1 i shed procedure. This standardization handbook was developed by the US Army Missile 2. inclusion in the military standardization handbook series. and procedures for use in precision cleaning of mater
3、ials. The handbook is not intended to be referenced in its entirety for mandatory use in procurement specifications except for informational purposes. Specific materials may be specified. No criteria herein is intended to supersede any specification requirements. This publication was approved on 31
4、January 1972 for printing and t 3. This document provides fundamental information on cleaning methods 4. Every effort has been made to reflect the latest information availa- ble. It is the intent to review this handbook periodically to insure its completeness and currency. Users requests for changes
5、 and inclusions in this handbook should be sent to: / Commanding General US Army Missile Command Standardization Division Reds tone Arsenal , Al abama 35809 AMSMI-RCS ii Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-HDBK-407 31 January 1971
6、FORWARD The purpose of this document was to establish general data for operational and performance characteristics in handbook form in accordance with Defense Standardization Manual 4120.3-M for use in contamination control technology. The information in this handbook was an accumulation of existing
7、 documents, Governmental , Technical Society, and DOD contractor data which after evaluation was considered pertinent to the state-of-the-art. Recomnended cleaning methods and procedures included are those used by military services and industry in gross and precision cleaning of materials, parts , a
8、nd assemblies being processed or assembl ed under control 1 ed envi ron- mental conditions. The most feasible sequence of application for each method or procedure in order to obtain maximum results during the precision cleaning cycles of categorized types of sensitive mechanisms (or components) was
9、considered in conjunction with the requirements of Mi 1-Std-1246A. , iii Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-HDBK-407 31 January 1972 SAFETY WARNING Adequate safety precautions should be taken when handling any chemical (solvent, c
10、leaning material, etc.). Inhalation or direct contact with the skin should be avoided. Appropriate protective clothing (suits, gloves, masks, etc.) should be used at all times, while handling chemicals, or when woyking around them. vary in toxicity, and others are asphyxiants. Some chemicals present
11、 fire hazards, others The Threshold Limit Values (TLV) or Maximum Allowable Concentration (MAC) is listed for most chemicals encountered in the clean room environ- ment. These are recomnended values only, and should be used as a guide, as some individuals are more sensitive to certain chemicals than
12、 others. When combinations of chemicals are used together or in proximity to each other the effects of the different hazards should be considered as additive. That is the sum of the following fractions. Cl, Cp, and Cn = Concentrations of the constituents Ti, T2, and Tn = TLV , Cn Tn - + . +- c2 cl T
13、1 T2 - Exam le. l&% trichloroethylene (TLV=200), and 200 ppm methyl ethyl ketone (TLV=250). Assume that the air contains 15 ppm carbontetrachloride (TLV=25), 15 1 O0 25 200 -+- +- 200 - - 475 - 1.9 250 2 50 Thus the accumulated - Note. More detailed Hygienists, 1014 Broadway, Cincinnati, Ohio 45202
14、or the Handbook of Toxicology, Vol. 1, Acute Toxicities , prepared by The National Academy of Sciences, National threshold limit is exceeded. information may be obtained from the Governmental Industrial -. Research Counci 1. - - iv Provided by IHS Not for Resale No reproduction or networking permitt
15、ed without license from IHS -,-,-MIL-HDBK-407 31 January 1972 CONTENTS Section Page 1 Introduction . 1.1 Objective . 1.1.1 Purpose 1.1.2 Contaminant . 1.1.2.1 Effects . 1.1.3 Reason 1.2 Scope . 1.2.1 Contamination Control 1.2.2 Precision Cleaning . 1.3 Major Problem Areas . 1.3.1 Atti tudes of Perso
16、nnel and Management 1.3.2 Training of Clean Room Personnel . 1.3.3 Cleaning Solution to Material Compati bi 1 i ty 1.4 Responsi bi 1 i ty 1.5 References 2 2 2 2 2 2 3 2 Glossary of Terms 5 2.1 Definitions . 5 2.2 References 28 3 Abbreviations 33 3.1 Abbreviations Defined . 33 3.2 References 35 4 His
17、thy of Contamination Control Technology 37 4.1 First Application . 37 4.1.1 War time Influence . 37 4.1.2 Earliest Clean Rooms . 37 4.1.3 Advancement by Industry 37 4.1.4 38 4.2 Clean1 iness Standards . 38 4.2.1 Technical Order 00-25-203 38 4.2.2 Federal Standard 209 . 38 4.2.2.1 Air Cleanliness Cla
18、sses . 38 4.2.3 Mil-Std-1246 A . 39 4.2.4 NAS 1638 . 42 4.3 References 42 Imp1 i cations of Techno1 ogi cal Advancements . 5 Contaminants Defined 43 5.1 General Defini tion 43 5.1.1 Pertaining to Contamination Control Technology . 43 5.1.1.1 Categories of Contamination . 43 5.1.2 Earth Atmosphere .
19、43 5.1.3 Everyday Environmental Contamination . 43 5.1.4 Contaminant Sizes 43 5.1.5 Sources and Forms 44 V Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-HDBK-407 31 January 1972 Section Page 5.2 Origin of Contaminants . 46 5.2.1 Control of A
20、tmospheric Contamination 46 5.2.2 Control of Clean Room Contamination . 46 5.3 Transportation of Contaminants . 46 5.3.1 Fluids 46 5.3.2 Solids 46 5.3.3 Physical Contact Carriers . 46 5.3.4 Waves . 47 5.4 Contamination Retention 48 5.4.1 Comnon Mechanisms of Retention 48 5.5 References . 49 6 Contam
21、ination Control Through Product Design 51 6.1 Effect of Product Design on Contamination Control 51 6.2 Methods of Contamination Control in Product Design . 51 6.2.1 Anticipate Effects of Contaminants 51 6.2.2 Control of Manufacturing Environment 51 6.2.3 Other Considerations 51 6.3 Specific Steps to
22、 Control Contamination 52 6.4 Checklist for Contamination Control Measures . 52 6.5 Factors which may Affect Contamination of a Product 53 6.5.1 Considerations 53 6.5.2 Techniques for Control 53 6.5.3 Specific Methods 53 6.6 Performance Levels . 58 6.7 References . 59 7 Corrsion . 61 7.1 Corrosion D
23、efirted 61 7.1.1 Chemical Corrosion 61 7.1.2 Electrochemical Corrosion 61 7.2 Effects of Environment on Metals . 61 7.2.1 Metal Properties 61 7.2.2 Environment . 61 7.3 Mil-Std-1250 . 62 7.4 Corrosion Forms 62 7.4.1 Intergranular Corrosion . 62 7.4.2 Crevice Corrosion . 62 7.4.3 Stress Corrosion 62
24、7.4.4 Hydrogen Embri ttlement 63 7.4.5 Galvanic Corrosion 63 7.5 Other Contributors to Corrosion 63 7.5.1 Porous Castings . 63 7.5.2 Fungi and Bacteria 63 vi Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MI L-HDB K-407 31 January 1972 Section Pa
25、ge 7.6 Corrosion Prevention 7.6.1 Intergranular Corrosion 7.6.2 Crevice Corros i on 7.6.3 Stress Corrosion . 7.6.5 Galvanic Corrosion . 7.6.6 Fungi 7.6.7 Metalic Coatings . 7.6.8 Material Choices . 7.7 Methods of Corrosion Removal 7.8 Corrosion Guide . 7.8.1 Reference Notes for Corrosion Guide Table
26、 XVI 7.9 References 7.6.4 Hydrogen Embri ttlement . 63 63 63 63 65 65 68 69 70 70 72 72 83 8 Clean Rooms and Work Stations 85 8.1 Clean Room Training Program 85 8.1.1 Presentation of Training Program . 85 8.1.2 Basic Curriculum . 85 8.1.2.1 Simulated Clean Room 85 8.1.3 8.1.2.2 Management Training .
27、 85 8.1.3 Specific Program . 85 8.1.4 Specialized Courses 86 8.1.5 Testing 87 8.2 Types of Clean Rooms 87 8.2.1 Conventional Flow Clean Room (Non-laminar 87 Airflow) . 87 8.2.1.1 Advantages 88 8.2.1.2 Disadvantages . 88 8.2.2 Laminar Airflow Clean Room . 89 8.2.2.1 Advantages 89 8.2.2.2 Disadvantage
28、s . 89 8.2.3 Vertical Laminar Airflow Clean Room 90 8.2.3.1 Advantages 90 8.2.3.2 Disadvantages . 91 8.2.4 Horizontal Laminar Airflow Clean Room 92 8.2.4.1 Advantages 92 8.2.4.2 Disadvantages . 92 8.2.5 Horizontal Laminar Airflow Tunnel 93 8.2.5.1 Advantages 94 8.2.5.2 Disadvantages . 94 8.3 Work St
29、ations . 95 8.3.1 Vertical Laminar Airflow Portable Curtain 95 8.3.1.1 Advantages 95 8.3.1.2 Disadvantages . 96 8.3.2 Vertical Laminar Airflow Work Bench 97 8.3.2.1 Advantages 97 8.3.2.2 Disadvantages . 97 I Provided by IHS Not for Resale No reproduction or networking permitted without license from
30、IHS -,-,-. MIL-HDBK-407 31 January 1972 Section Page 8.3.3 Horizontal Laminar Airflow Work Bench . 98 8.3.3.1 Advantages . 98 8.3.3.2 Disadvantages 98 8.3.4 Balanced Laminar Airflow Hood . 99 8.3.4.1 Limitations 99 8.3.4.2 Functions 100 8.3.5 Non-Lami nar Airflow Work Bench 100 8.3.6 Fume Hoods 100
31、8.3.6.1 Standard Types . 100 8.3.6.2 Requirements for Operation . 101 8.4 References . 103 9 Clean Room Construction Features and Equipment 105 9.1 Clean Room Construction Features . 105 9.1.1 Location 105 9.1.2 Construction Materials and Design Features 105 9.1.2.1 Wood . 105 9.1 . 2.2 Dry-Wal 1 Co
32、nstruction 105 9.1.2.3 Walls and Ceilings . 105 9.1.2.4 Floors . 106 9.1.2.5 Plenums and Ducting 106 9.1.2.6 Air Inlets . 106 9.1.2.7 Airlocks . 106 9.1.2.8 Doors 107 9.1.2.9 Anterooms 107 9.2 Clean Rom Furniture . 107 9.2.1 Chairs or Stools 107 9.2.2 Benches and Work Surfaces . 108 9.3 Equipment 10
33、8 9.4 References 108 10 Air Filters for Contamination Control Facilities 10.1 Characteristics of Filters Used in Clean Rooms 10.1.1 Method of Particle Entrapment . 10.1.2 Airflow . 10.1.3 Service Life 1 O . 1.4 Resistance Increase . 10.1.5 Efficiency Rating . Types of Air Filters 10.2.1 Industri al
34、Fi 1 ters 10.2.2 Ventilation Filters . 10.2.3 Intermediate Efficiency Filters . 10.2.4 High Efficiency Particulate Air (HEPA) Filters 10.3 Selecting Air Filters . 10.3.1 Factors to Consider . 10.3.2 Interrelated Factors 10.2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 11 11 11 11 11 11 12 13 13 13 13 14 14 14 15
35、viii i Provided by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-MIL-HDBK-407 31 January 1972 iecti on Page 10.3.3 Procurement Specification . 10.3.4 Prefiltration . 10.4 Composition of High Efficiency Particulate Air Filter 10.4.1 Efficiency Rating . 10.4.
36、2 10.4.3 Gasket Fitting 10.4.4 Effect of Changes in Air Pressure . 10.4.5 HEPA Filters for Clean Rooms 10.5 Ai r-Supply Conditioning . 10.5.1 Purpose . 10.5.2 Factors Influencing Air Condition Design 10.5.3 Special Considerations 10.5.4 Control of Airborne Contaminants 10.5.4.1 Removal of Particulat
37、e Matter . 10.5.4.2 Control of Gases and Vapors . 10.5.5 Section of Filters 10.5.6 Filters for Removal of Gaseous Contaminants . 10.5.6.1 Sel ecti on of Absorbents . 10.5.6.1.1 Activated Charcoal 10.6 References (HEPA) Fragi 1 i ty of HEPA Fi 1 ter 115 115 115 116 116 116 116 117 117 117 177 117 118
38、 118 118 119 119 119 120 121 11 Temperature and Humidity in Clean Room Facilities . 11 . 1 Factors Inf 1 uenci ng Selection of Temperature and Humidity Limits 11 . 1. 1 Locati on 11.1.2 Amount of Air . 11.1.2.1 Air Volume in Non-Laminar and Laminar Faci 1 i ties 11.1.3 Heat 11 . 2 Temperature Contro
39、l . 11.2.1 Temperature Monitoring 11.2.1.1 Nonrecording Automated Equipment 11.2.1.2 Automated Recording Devices . 11.3 Humidity 11.3.1 Minimum Re1 ative Humi di ty (RH) Val ues . 11.3.2 Humi di ty Moni tori ng . 11.4 References 123 123 123 123 123 123 123 123 124 124 124 124 124 124 12 Clean Room G
40、arments . 125 12.1 Primary Purpose for Garmenting 125 12.2 Fabrics . 125 12.2.1 General Description of Some Synthetic Fabrics . 125 12.2.2 Combi nati on Fabri cs . 126 12.3 Garment Construction 126 12.4 Soiling and Laundering 126 12.4.1 Anti-Static Treatment . 127 12.4.2 Fire-proofing . 127 ix Provi
41、ded by IHS Not for Resale No reproduction or networking permitted without license from IHS -,-,-. MIL-HDBK-407 31 January 1972 Section Page 12.5 Available Garments . 127 12.6 Garment Specification . 128 12.7 References 128 13 Airborne Contamination . 129 13.1.1 Effect of Human Activities on Natural
42、Air . 130 13.1.2 Airborne Contaminant 130 13.1.3 Natural and Foreign Airborne Contaminants. 130 13.1.3.1 Natural Sources . 130 13.1.3.2 Man-made Sources 130 13.1.4 Saturation Potential 131 13.1.5 Air-Pollution Potential . 131 13.2 Classification and Sources of Airborne Contaminants . 131 13.2.1 Cont
43、aminant Classification 131 13.2.1.1 Organic Gases . 132 13.2.1.2 Inorganic Gases . 132 13.2.1.3 Aerosols 132 13.2.2 Contaminant Sources . 133 13.2.2.1 Petroleum Industry 133 13.2.2.2 Metallurgical Industry 133 13.2.2.3 Organic Solvent Usage . 133 13.2.2.4 Mineral Processing 134 13.2.2.5 Motor Vehicl
44、es 134 13.2.2.6 Combustion Processes 134 13.2.2.7 Other Industry 135 13.2.2.8 Natural Environment . 135 13.3 Control Techniques for Atmospheric Air 137 Contaminants.#. . 137 13.3.1 Elimination . 137 13.3.2 Zoning 137 13.3.3 Controlling . 137 Techniques 137 13.4 Air Pollution Control Devices . 138 13
45、.4.1 Aerosols 138 13.4.2 Gases . 138 13.5 Detecting and Measuring Atmospheric Air Contaminants 141 13.5.1 Factors to be Considered in On-The-Spot Testing . 141 13.5.2 Air Sampling and Test Methods . 141 13.5.2.1 Methods Applied to Particulates . 141 13.5.2.2 Methods Applied to Gases 141 13.1 Natural
46、 Atmospheric Air . 129 13.3.3.1 Current Air-Pol lution Control 13.6 Control Techniques for Airborne Contaminants within Control led Envi ronments . 142 13.6.1 Major Sources of Contaminants Within a Control 1 ed Area 142 X Provided by IHS Not for Resale No reproduction or networking permitted without
47、 license from IHS -,-,-MIL -HDBK-407 31 January 1972 Section Page 13.6.1.1 Air Supply 142 13.6.1.2 Activities Within the Controlled Area . 142 13.6.3 Characteristics that Affect Control . 146 13.6.2 Control Factors . 145 13.7 References 146 14 Control of Surface Contamination 147 14.1 Surface Contam
48、ination . 147 14.1.1 Primary Problem . 147 14.1.2 Particle Size . 147 14.1.4 How Particles are Deposited . 147 14.1.5 General Classification of Soils . 147 14.2.1 Design Considerations . 148 14.3.1 Broad Classifications of Processes 14E 14.1.3 Deformability . 147 14.2 Purpose of Surface Cleaning . 1
49、45 14.3 Surface Cleaning Processes 148 14.3.2 Liquid Cleaning Media . 149 14.3.3 Complex Phenomena of Liquid Cleaners 149 14.3.3.1 Wetting . 149 14.3.3.2 Emulsification 150 14.3.3.3 Saponification 150 14.3.3.5 Solvent Activity 151 14.3.3.8 Alkalinity and Acidity 153 14.3.3.9 Hard Versus Soft Water 154 14.3.3.11 Rinsing . 154 14.3.4 Complexity of Surface Cleaning 155 14.3.3.4 Defl
