Batch Processing Definition, Advantages, Disadvantages.ppt
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1、1,Batch Processing Definition, Advantages, Disadvantages,A sequence of one more steps (recipe) usually carried out in more than one vessel and in a defined order, yielding a finished product Production amounts are usually smaller than for continuous processing Requires reduced inventories and shorte
2、r response times Final product quality must be satisfied with each batch (no blending) More emphasis on production scheduling in batch processing,2,Other Advantages,Batch time can be adjusted to meet quality specs Repetition is conducive to continuous improvement in product Slow dynamics permit real
3、-time calculations Greater agility,3,4,Batch Processing Used in Manufacturing,Electronic materials Specialty chemicals Metals Ceramics Polymers Food and agricultural materials Biochemicals Multiphase materials/blends Coatings Composites,5,Representative processing steps in a semiconductor wafer fab
4、(Deposition, Patterning, Etching, Doping, etc),6,Unit operations in microelectronics manufacturing are characterized by:,Physical/chemical complexity Inability to measure directly many process variables High sensitivity to process changes Multiple inputs/multiple outputs,7,CD Variation Effects in Pa
5、ttern Transfer,Wafer,Flatness Reflectivity Topography,Resist,Reticle,Temperature Uniformity Time Delay,Aberrations Lens Heating Focus Leveling Dose,CD Defects Edge Roughness Proximity Effects,Stepper,Time Temperature Dispense Pattern Rinse,Refractive Index Thickness Uniformity Viscosity Contrast,PEB
6、,Develop,Power Pressure Flow rates,Etch,Amines Humidity Pressure,Environment,8,Silicon Integrated Circuit Technology Roadmap,9,Comparative Economics,Revenue/Capital1Chemical & Petrochemical 22.4Pharmaceutical 19.6Semiconductor 6.8Capital productivity is a major driving force for semiconductors _ 1Fr
7、om 1997 US Census Bureau,10,Why Control Critical Dimension (CD)?,Small changes in CD distribution = Large $ values lost,290,11,Figure 19.1 The five levels of process control and optimization inmanufacturing. Time scales are shown for each level.,12,Control Hierarchy in Batch Processing,Sequential co
8、ntrol to step the process through a recipe Logic control to deal with device interlocks Within-the-batch control to make set point changes and reject disturbances Run-to-run control to meet final quality constraints Batch production control to maximize utilization of equipment and minimize cycle tim
9、e,13,Batch Mixing Tank-Operations Sequence,Introduce liquid A until level reaches LH2 Close A valve, open B valve and start mixer When level reaches LXH2, stop flow of B and the mixer and open discharge valve (VN9) Discharge product until level reaches LL2, then close the discharge valve.,14,Figure
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